Design And Calculation Of A New Micro-displacement Mechanism

At present it is relatively mature in the structure of micro-displacement worktable to realize the translational motion in single direction or X and Y directions. Micro-displacement worktable has evolved into the double flexible hinges in the cross symmetry integration structure from original inside and outside two layer nested structure, and it eliminates the couple displacement in different directions from the principle. The geometry size of micro-displacement worktable decreases greatly and increases positioning accuracy. However, flexible hinge micro-displacement worktable that driven by a piezoelectric actuator has not realized X, Y, Z three directions without coupling translational, therefore this topic has designed a3D decoupling micro-displacement worktable, realizing coupling translational between the X, Y, Z three directions. First, a large number of document literatures related to micro-positioning technology has been consulted, and on the basis of the summary and analysis of home and abroad existing document related to working principle and structure of flexible hinge micro-displacement stage, determine the integral structure design scheme of3D decoupling micro-displacement worktable-uniaxial and biaxial flexible hinge with double flexible hinges cross symmetric structure, and introduces the concrete structure and working principle of the3D decoupling micro-displacement worktable. The worktable solves the coupling displacement between three directions. Then mechanics analysis has been done to uniaxial and biaxial flexure hinge, and deduces the angle stiffness calculation formula of theory of uniaxial and biaxial flexure hinge, and it is verified through finite element analysis and calculation. The displacement and stress of3D decoupling micro-displacement worktable has been done with finite element analysis calculation, and orthogonal test and regression analysis has been used to do mathematical modeling. Then, through the analysis of the structure characteristics of uniaxial and biaxial flexible hinge to determine the processing and assembly connection of3D decoupling micro-displacement worktable. Finally the small angular displacement of the mechanism is summarized and analysis on the principle, and put forward rotation micro-displacement worktable is a development direction in the future.