Parameter Optimization Of Air Bearing System In ITO Conductive Glass Optical Inspection

Due to its advantages of homogenization error,no pollution and long life,the air bearing is widely used to support precision parts such as ITO conductive glass.With the large size and thinness of the conductive glass,the on-line transportation and optical detection of the conductive glass puts higher and higher requirements on the air bearing.Based on the theory of gas lubrication and plate and shell deformation,this paper completed the following research work on the parameter optimization of ITO conductive glass air bearing transmission system:(1)Based on the gas lubrication theory,the pressure distribution equation on the gas film surface of the air flotation system is established.Based on the finite difference,the mathematical model of the small deflection bending of the conductive glass under the continuous air buoyancy force is established.(2)The characteristics of gas film flow field under different gas supply modes and different negative pressure inlet holes are analyzed.The deflection values of the conductive glass at three inlet apertures were calculated by finite difference and compared with the Ansys results and the reasonable range of the inlet spacing was set by combining the air flotation performance under different inlet spacing.(3)On the basis of cell optimization,the three-dimensional model of the whole air-flotation system is built.The effects of air-flotation clearance,length of throttle pipe and radius of air chamber on the performance of air-flotation,mass flow of consumed gas and bending deformation of conductive glass with small deflection are analyzed in detail by using Fluent and Ansys workbench unidirectional fluidstructure coupling module.Considering various aspects,the reasonable range of values of air flotation gap,throttle length and air cavity radius parameters is given.(4)Based on the theoretical analysis and simulation optimization results,the critical speed of steady-state motion of conductive glass is given based on the modal analysis of conductive glass.(5)On the basis of theoretical research and simulation analysis,the air-floating system of conductive glass defect optical detection instrument was developed,and the performance of the instrument reached the requirements of the design task book.The research results of this paper provide a theoretical reference for the design of air-floating system for ITO conductive glass defect optical inspection instrument,and have a universal reference value for the design of air-floating system of similar instruments.