Research On The Novel Bionic Compliant Joint And Its Spatial Parallel Micropositioning Plantform

With the rapid development of science and technology,the requirements of the instrument and equipment in those filed such as aerospace,microelectronic,bioengineering,nanotechnology are higher and higher to micro-positioning system,especially for the resolution ratio of the micro-positioning plantform and the motion travel.The main purpose of this paper is to researching and designing a novel joints which is inspired by the compliant joint and large stroke of Hammer Orchids.And through replacing the compliant joints,a complaint-parallel positioning plantform is designed and analysed.This paper studies the following three aspects and experiments.(1)The design and optimization about the bio-inspired compliant joints.Firstly,utilizing the theory of bionics designs a novel compliant joint which inspired by the plant of Hammer Orchids.Then,analysing the mathematical model of the joint,moreover,the way of single variable optimization of bio-inspired complaint joint was performed to confirm the radian of compliant joint,the results show that the design of arc-flexure joint is more reasonable,moerover,the parameters of each dimension of the joint are determined by further multivariate optimization analysis.(2)Experimental study of dual parallelogram mechanism based on bionic compliant joints.Calibrating and collimating a piezelectric ceramic actuator and a dual frequency laser interferometer by building an experimental platfrm,two group of contrast experiments was implemented to verify the joints which was optimized had better performance,further more,the improved methods was put forward.(3)Design and analysis of the compliant-parallel positioning mechanism.A micro-positioning platform is designed based on the novel compliant joint.Then the freedom and the jacobian matrix of the stage is carried out,and comparison between the theoretical output displacement and the simulated output displacement,it proves that the jacobian matrix has good accuracy,and the motion travel of new plantform is also obtained.Finally,the motion travel of the plantform has been further improved by further optimization.(4)Study on the control method of the compliant micropositioning plantform with threedegrees of fredom.The transfer function of the micro-positioning plantform was analyzed,then PID controller and a fuzzy-PID controller is designed,the results shows that the fuzzy-PID controller owes higher performance.