Optical System Design Of High Resolution Micro Spectrometer

Spectrometer is an optical instrument that combines spectroscopy and imaging technology.Traditional spectroscopy instruments are extremely limited due to their large size,high price,and inability to detect on-line.With the development of multi-directional technology and market application requirements,miniaturization has become the development trend of spectrometers.This paper mainly analyzes and expounds the Czerny-Turner spectrometer based on plane grating.The high-resolution microspectrometer is designed to perform spectral measurements on the exit light of a white-light dispersion confocal measurement system in the "Development and Application of Automatic Optical Inspection Instruments for Flat Panel Displays".According to the measurement requirements of the white light dispersion confocal measurement system,the designed micro spectrometer has a spectral range of 300-800 run(including the visible spectrum range)and a spectral resolution of 1 nm.The paper introduces the core device grating of the spectrometer.The dispersion principle and grating characteristics of the plane reflection diffraction grating commonly used in miniature spectrometers are analyzed.Detailed analysis of the grating was performed using TracePro software.The effects of slit size,grating,etc.on the resolution of the spectrometer were analyzed.In optical design,.combining the principle of geometrical light path and the theory of aberrance,the paper proposes a feedback optimization process for the selection of parameters of spectrometer components.And the design flow of the system is given,and the tolerance analysis of the optical system is carried out.Finally,a high-resolution micro system was given and the ZEMAX simulation was completed.In the development of the micro spectrometer prototype,the prototype design was completed by considering the circuit design,electromechanical structure design and software design.The basic concept of wavelength calibration is briefly introduced,and some methods of wavelength calibration are proposed to verify the performance of the instrument.Its performance basically meets the design requirements of the spectrometer.