Research On Cross-scale Precision Motion Platform Applied To SEM Based On Inertial Stick-slip Drive

Nanotechnology is one of the research hotspots in the field of science and technology.It has a wide range of applications in bioengineering,microscopy,aerospace,fiber optic docking and precision positioning,and plays a vital role in the development of national economy and science and technology.Micro-driven precision positioning technology is an important part of nanotechnology,and its development level restricts the development level of nanotechnology.At present,the micro-drive precision positioning technology has nano-level positioning accuracy,but the range of motion is small,and it is difficult to achieve high-precision positioning and large operating range in a limited space.This poses new challenges and requirements for micro-drive precision positioning technology.Based on this,this paper studies the application of micro-drive technology in the automation of SEM,and proposes a new type of cross-scale precision motion platform based on inertial stick-slip drive,and conducts detailed research and analysis on its key technical issues.In this paper,under the support of the National Natural Science Foundation of China Youth Fund Project " Study on the SEM-based inertial stick-slip drive cross-scale precision motion mechanism and implementation method(No.51505314),the research results of inertial stick-slip drive technology by domestic and foreign scholars are The problems encountered in the SEM automated operation technology are summarized and analyzed.The subject will be the friction mechanism of the textured friction interface,the influence of the textured friction interface on the inertial stick-slip motion,the inertial stick-slip drive prototype structure and the inertial stick-slip drive experimental system are studied in four aspects:Firstly,the friction mechanism of inertial stick-slip driving friction interface texture is studied.The inertial stick-slip drive principle is elaborated in detail,and the motion state of the inertia block and the slider under the excitation of the electric signal is analyzed,and the importance of the friction force to the inertial stick-slip drive is clarified.Since the topographical parameters of micro-texture belong to the micro-nano scale,the micro-friction mechanics of the friction interface texture is developed from the three aspects of van der Waals force,electrostatic force and ratchet model.The influence of friction interface texture on friction is analyzed.Provide guidance on the design of texture types.Secondly,the effect of the textured friction interface on the inertial stick-slip drive is studied.The suitable micro-texture type is optimized,the three-dimensional texture of the texture is simplified and the mathematical model is established.Based on this,the single-factor experimental method is used to design the relevant topographic parameters.Machining micro-textile test pieces and designing test prototypes,and setting up an experimental system for testing.The influence of the micro-texture of different parameters on the inertial stick-slip drive performance is tested,and the optimal parameters are optimized and the reasons are analyzed.Thirdly,study the design of the inertial stick-slip drive prototype.In order to achieve automated operation of the SEM,the prototype needs to meet the requirements of small size and flexibility.In this paper,we choose to use the trackless structure design scheme to reduce the volume of the prototype,and use the cooperation of two piezoelectric ceramics to realize the two-degree-of-freedom motion.Establish a kinematic model to investigate the effect of overturning moment on inertial stick-slip motion.In order to ensure the output displacement of the piezoelectric ceramic and the directionality of the force,a parallel plate flexible hinge is used as the transmission mechanism.Through the optimization of the structure of the prototype,the optimal solution was determined,and three prototypes were designed.Finally,build an inertial stick-slip drive test system.Separate static and dynamic test systems to measure the performanee of the prototype.Test the influenee of overturning moment on inertial stick-slip motion and verify the correctness of the theory.The single-degree-of-freedom prototype and the two-degree-of-freedom prototype were tested for performance,and the important parameters such as the moving speed,resolution,rotation speed and step repeatability of the prototype were obtained,and the optimized micro-textured test piece was tested on the new prototype,verify that the surface texture has an effect on the inertial stick-slip motion performance again.