A Compound Interferometer Which Can Realize Equal Thickness Interference And Equal Inclination Interference By Using A Zoom System

The interferometer is an optical testing instrument that uses the interferometry to obtain high-precision measurements of various parameters of optical materials,components,and systems.To expand the application of a single interferometer,a new type of interferometer is studied that is a zoom system and can switch between equal-thickness interference and equal inclination interference.This theoretical and technical research facilitates the development of higher performance interferometers and has guiding significance for practical projects.The thesis analyzed the interference principle and the optical path structure and working principle of the commonly used interferometer,proposed the design scheme of the equal-thickness & equal inclination interferometer.After analyzing the problems that need to be addressed in the design,the design of optical system was completed,and then simulated the interferometer to obtain the equal-thickness & equal inclination interferogram.Then the structural design of the interferometer was completed,and it was equipped with a special fastening and adjustment mechanism.The optical components,mechanical structure and surfaces are specially designed to suppress the stray light in the interferometer.The 3D model was completed via the TracePro software to track the rays in the equal thickness interference and the equal inclination interference.It shows that the interferometer can suppress the undesired stray light,and the interference fringes are clearly distinguishable.