The Mechanism Of Vibration Isolation And Experimental Research In Micro-nano Measurement Worktable

With the rapid development of science and technology, the geometrical dimension of physical entity in scientific research and industry manufacturing is expanding to the tiny field, from millimeter, micrometer expand to nanometer. MEMS and nano-measurement technic is the rising high-tech field of the end of 20th century. In the process of measurement of physical entity, need an excellent vibration isolation table. Otherwise any tiny vibration such as the step or voice of human will effect the measurement result. So for resolving the distribution of vibration in the precise measurement is very important.Through the study on plenty of national and international material, this paper introduces a method of mixed vibration with passive and active isolation system to provide a nice vibration isolation environment. Tested and analyzed the passive vibration system, designed the mixed vibration system and take a research of computer simulation.The test result of passive vibration isolation indicate that the competence of two grad system is more efficient than one grad system;but either the one grad system or two grad system is efficient only to high frequency vibration, to low frequency vibration, the isolation competence is bad.Aimed at the disadvantage of passive system, carry out a scheme of active vibration control, researched the control arithmetic. This paper adopt the advanced F-PID arithmetic, By the MATLAB simulation, the main disadvantage of the PID arithmetic is found, the competence of mixed vibration isolation system with active vibration isolation method is enhanced compared with passive system.