Development Of Two-wire Reeling Non-inductive Platinum Film Thermistor

Thin film platinum thermal resistance has the advantages of small size and high measurement accuracy,and it is widely used in high precision measurement of temperature in various fields such as aviation,aerospace,industry and agriculture.Coupling radiation of electromagnetic wave exists widely in measurement and control circuits,forming electromagnetic interference space environment and affecting the performance of various electronic components.How to effectively suppress electromagnetic interference in space environment by thin film platinum thermal resistance is one of the technical difficulties to realize a ccurate temperature measurement under external electromagnetic interference environment.In order to solve the problem of weak electromagnetic interference ability of platinum thermoelectric impedance in thin films,a solution of accurate temperature measurement in electromagnetic field environment is proposed.Based on electromagnetic induction principle,the thin film platinum thermal resistance as a traditional type sensor 2 d variant form of tiny,establish a non-inductive structure model,using the double parallel wiring technology,reduce the electromagnetic interference of thermal components to the simulation analysis of product structure,design sensitive resistor gate line width of 30 microns,platinum film thickness 1.5?2microns,such as analysis target important raw materials such as ceramic substrate and high pure platinum impact on product performance,and carries on the optimization of platinum membrane preparation,fine etching,ceramic laser perforation,coating sintering passivation,the key techniques and laser trimming resistor,clear the process method of process parameters,At the same time,a test system was set up to analyze various indexes of the product.Experimental results show that the structure design of the bifilar winding film platinum thermal resistance in the precision of resistance,insulation resistance,temperature coefficient,technical indicators of response time,repeatability on similar to conventional thin film platinum thermal resistance index,meet the design requirements,at the same time,in the 0.1 k Hz,1 k Hz and 10 k Hz inductance characteristics under different frequency is decreased obviously,which can effectively reduce the outside electromagnetic field temperature measurement,suitable for precise temperature measurement under the environment of electromagnetic field.