Study On The Key Technique Of High-efficiency Low-damage Lapping And Polishing For Wedge Lens

The device has a large demand for the optical elements,which requires not only to ensure the efficiency of the process,but also to control the damage in the process.The existing processing of optical components consist of grinding,lapping,coarse polishing and fine polishing.Lapping and coarse polishing is divided into uniform removal of lapping,lapping figuring,uniform removal of coarse polishing,coarse polishing figuring,which accounts for one-third of the entire process.The roughness of the optical elements is 3-4nm,which is difficult to cope with the new challenges posed by the development of laser fusion devices to optical elements.This paper mainly focuses on the optimization of the existing technology,which is of low efficiency and high damage.Based on the theory of theory of indentation fracture,the model of the depth of the subsurface damage of lapping was established,and the material removal efficiency model was established with three-body brittle removal of abrasive grains as the research object.The efficiency and damage of diamond and silicon carbide is compared by simulation,the effect of tip angle of abrasive on efficiency and damage is calculated by the model.The variation law of the force and the n?mber of abrasive grains is discussed.The correctness of the model is verified by experiment.It is concluded that the efficiency of diamond powder is higher than that of silicon carbide and the damage layer is small.The relationship between efficiency and damage is difficult to be weighed by existing processes.Based on efficiency model and damage model,the concept of effective removal rate of damage is proposed,which provides theoretical guidance for finding the balance between efficiency and damage.The variation law of damage effective removal with process parameters was calculated by simulation,the model is verified by experiment.By using single factor combination method,the process planning is based on the effective removal rate of damage,and the corresponding experiments are carried out.Based on the Hertz contact theory,a fast polishing material removal model was established,and the efficiency of the material removal efficiency is calculated by simulation,and the correctness of the model is verified by experiment,and a small workpiece50 mm ×50mm is polished by fast polishing device.Compared with ceri?m oxide abrasive,the surface roughness and thermal absorption coefficient of mixed abrasive are better than ceri?m oxide,but the efficiency of material removal is lower than ceri?m oxide.The paper establishes the roughness model,the cause of the low damage of mixed abrasive is given from a mechanical point of view,and the variation of surface roughness with technological parameters is simulated.Based on the existing requirements,a fast polishing device is designed and optimized from the tool.Based on the results of the previous chapters,the process of high efficiency and low damage in the lapping process is proposed,and it is used in engineering parts processing,shortening the processing period and meeting the requirements of surface precision.The research of this topic can shorten the processing period of optical components and realize the high efficiency and low damage machining.