Research On Key Technologies Of Subsurface/Body Defect Detection Of Fused Quartz Optical Elements

As ultra-precision optical systems are more and more widely used in science,military and daily life,the quality requirements for fused silica optical elements used in the system are also becoming higher.How to carry out high-precision and quantitative automatic detection of the subsurface and internal defects of fused silica optical components is a major problem in the field of optical manufacturing.This paper studies the detection technology of subsurface and body defects in fused silica optical components,analyzes the key difficulties,and tests the effectiveness of the main research results of this paper through the combination of simulation and experiment.For the detection of subsurface defects of fused silica optical components,the basic principle of using laser confocal microscopy to detect subsurface defects of components is discussed.A multi-field tomographic image mosaic algorithm is proposed,and the information of subsurface defects is analyzed.The problem of extraction of subsurface defects is analyzed,and on this basis,the key three-dimensional reconstruction algorithm is studied.Then,a body defect detection system for fused silica optical components was established.Based on the actual body defect data,an out-of-focus defect area rejection algorithm was proposed.Image compression and 3D reconstruction techniques under massive data were also studied.Finally,through experiments,the accuracy of the image stitching algorithm and 3D reconstruction technology in the detection of subsurface defects was verified.The performance of defocus removal and massive data processing algorithm in body defect detection is also tested.The experimental results prove the effectiveness of the algorithm proposed in this paper,and the main research results have been applied to the actual detection system.