Pull-in Analysis And Damping Compensation Input Shaping Control Of Torsional MEMS Optical Switch

MEMS optical switch has become the important component of the data exchange in communication applications with its advantages of fast response speed,miniaturization,and compatible with traditional CMOS technology.At present,some domestic companies generally only carry out back-end packaging of chips in the chain of MEMS Optical Switches,and can't design and manufacture a torsional MEMS Optical Switch with excellent performance.One of reasons is that the pull-in phenomenon and mechanical property are not studied deeply enough.In addition,most MEMS Optical Switches in market are controlled by single step controller.The optical switch oscillates violently around the target position,slowing down the response speed.In order to solve these problems,the dynamic model of MEMS Optical Switch is established and effectiveness of the static model is verified,which lays foundation for the subsequent controller analysis.Secondly,based on the established model,the pull-in effect is analyzed.By constructing a full-range optical switch,how to eliminate the pull-in phenomenon is introduced in greater detail,and the influence on drive curve by critical dimension parameters is analyzed.Then analyze the dynamic response of MEMS Optical Switch under control by different controller.The damping loss is compensated twice for input shaping controller based on energy conservation,which can obviously weaken residual vibration and accelerate the response speed.Finally,the robustness of this input shaping controller to the moment of inertia I? and damping coefficient? is analyzed,the research finds that this input shaping controller is still working with 15% parameter uncertainty of damping coefficient or 5% parameter uncertainty of the moment of inertial.