High-speed AFM (Atomic Force Microscope) cantilevers via micro molding and pattern transfer to polymer-derived ceramic

Atomic Force Microscopy (AFM) is commonly used for topographic characterization of sample surfaces at the nanoscale. In order to enable high-speed AFM applications, cantilevers with high resonant frequencies and low spring constants are needed. Such enhancements in resonant frequency may be achieved by changing cantilever material and design.;Concerning materials for high speed AFM cantilevers, silicon carbide has been chosen as a novel and ideal candidate due to its unique properties (e.g. high stiffness, hardness, and chemical resistance). A commercial polymeric precursor (Starfire Systems SMP-10) of silicon carbide is used for making cantilevers consisting of pre-ceramic polymer networks, so-called "green bodies", which are subsequently converted to silicon carbide via pyrolysis.;In tandem, in order to enable new cantilever designs, variations and improvements on micro-molding and pattern transfer techniques such as nanoimprint, photo- and soft lithography, are demonstrated in this study.;The patterned silicon carbide produced here is characterized by optical microscopy (OM), atomic force microscopy (AFM), scanning electron microscopy (SEM) and profilometry. The results indicate that pattern replication is possible with a high level of fidelity, and that intact cantilevers may be made via this approach.