| This thesis presents a novel stressed MEMS coplanar waveguide (CPW) cantilever to solve the limitations of conventional cantilevers in EFM measurements. The CPW structure creates a matched impedance and shields the signal conductor along the cantilever to improve bandwidth, reduce electromagnetic interference effects, and enable better access to IC test points. This thesis focuses on selection considerations, theoretical calculation and analysis, design, modeling, simulation, fabrication, and testing of CPW cantilevers.; This thesis presents selection considerations of the designed CPW cantilevers according to electrical and mechanical requirements. It provides analytical expressions and experimental formulas to compute the characteristic impedance, effective dielectric constant, and attenuation of CPW lines. The theoretical calculations and analyses are used to obtain the optimum dimensions of CPW cantilevers. HFSS electromagnetic simulation results are used to modify and verify the performance of the designed CPW cantilevers. (Abstract shortened by UMI.)... |
