| MEMS technology is an emerging capability that is beginning to revolutionize various systems by combining electronics with miniaturized mechanical actuators to perform sensing, optical switching, and various other applications. One engineering need in this new field is an actuator capable of traveling long distances, while maintaining low power, low voltage, and accuracy required for optical coupling. A Micro-Translation Stage is developed in this thesis that fulfills the needs described above. This new concept was designed based on current electronics and MEMS fabrication methods, using capacitive forces set up in a linear motor fashion, to pull a translating shuttle down a channel. Analyses were performed to assure the stresses, friction and electrostatic forces were all acceptable to allow a successful operation of this device. A plan for fabrication of the device was also generated, showing that this device could be successfully produced sometime in the future. The realization of this Micro-Translation Stage could enable designers to develop new devices that current MEMS capabilities cannot achieve. |
