Droplets generation mechanisms by graphite cathodes in the vacuum arc deposition technique

he most severe problem for the vacuum arc deposition (VAD) technique is the formation of micron-size particles on the films. These particles degrade the films' properties. The present work studied the generation mechanisms and characteristics of the droplets that are produced in the carbon films deposited by vacuum arc technique. To achieve a better control of the generation mechanism of these droplets, the effect of the arc current, arc duration time, cathode spot temperature and distance between cathode and substrate on the size and population of the micro-droplets are studied.;The micro-droplets are in the range of 0.3...