Construction Of Anhui Vacuum Metering Station And Study Of Wide-rage Vacuum Gauge

Vacuum measuring instruments were widely used in the field of relatedindustrial processes and scientific experiments. As many vacuum gaugesmeasurement were made indirectly, the calibration of them is of great importance.This paper describes the preparative work of the construction of Anhui vacuummetering station, including equipment selection or updating, system construction,testing and leak detection. By means of membrane capacitance gauge, referencegauge and static expansion method, the system was supposed to be able to calibrategauges in a wide range from104to10-4Pa. The successful construction of Anhuivacuum metering station can serve not only our own scientific research projects,but also adjacent vacuum-related business.Every vacuum gauge head has its own measurement limit. To meet the need ofwide range measurement from atmospheric pressure to high vacuum, which is oftenrequired in many applications, a great deal of attention was paied to the researchand development of wide-range vacuum gauges. This paper also developed awide-range vaccum measuring instrument of complex vacuum gauges containing aionization gauge and a thermocouple gauge. Its measurment range is105~10-5Pa.Low and high vacuum signal was acquired by a thermocouple gauge and aionization gauge respectively. A electronic control system, mainly composed of thecore processing chip of Freescale16-bit microcontroller MC9S12DG128, canswitch between the two gauges automatically according the vaccum degree beingmeasured. The tiny signal acquired by the vacuum gauge head is amplified,converted into digital, and then displayed in LED or LCD. The paper also givessome idea about the development trend of vacuum gauges.