| In recent years,industrial technology continues to develop toward modernization,industrialization and scale,various extreme working conditions frequently appear,and more stringent requirements are put forward for processing tools and materials.As a high performance material,hard coating can be used as a protective coating on the surface of the material,thus improving the service life of the material and enabling it to adapt to more complex working environment.Hard coating is usually composed of high hardness,high melting point of carbide,nitride,carbon nitride,boride,oxide,diamond and diamond-like film materials.As the fourth main group element,nitride hard coating has excellent comprehensive performance,with high melting point,high hardness,excellent wear resistance,good electrical conductivity,and excellent corrosion resistance and other properties,and hard coating is extensively used in aerospace,machinery manufacturing,automotive,mold processing and other fields.The performance of hard coating directly affects the service life and processing efficiency of processed materials.Therefore,the preparation and improvement of nitride hard coating is one of the topics to be explored in advanced manufacturing industry.This paper first used FJL520 magnetron sputtering equipment in TC4 titanium for the prepar ation of TiN coating and ZrN coating,by means of argon and nitrogen flow than applying negative bias,deposition temperature,and the process parameters such as the control,studies the TiN coating under different control parameters,phase of ZrN coating,hardness,adhesion,electrochemical properties change rule,determines the optimum process parameter values.In this paper,two methods of preparing TiZrN composite coating were also studied.According to the determined process parameters,TiZrN multi-layer composite coating was prepared by using different Ti and Zr ratio composite targets,and TiN/ZrN and ZrN/TiN multi-layer composite coatings were prepared by using pure targets,and the phase,hardness,bonding force and electrochemical performance were analyzed.performance when the flow ratio of argon to nitrogen is 3:1,the deposition temperature is 200?,and the negative bias voltage is 100V.The comprehensive performance of the prepared TiZrN coating is obviously better than that of the binary nitride coating.The composite properties of TiZrN multi-layer coatings prepared by using composite targets with different ratios of Ti and Zr are obviously better than that of multi-layer TiN/ZrN and ZrN/TiN coatings.When Ti:Zr is 2:1,the composite properties of TiZrN coatings are the best,and the hardness can reach 33.955GPa.When the content of Zr is too large,The interaction between Ti and Zr will lead to the same kind of atom segregation phenomenon inside the coating,which will increase the internal stress of the coating,lead to the decrease of the toughness of the coating,and the poor bonding performance.Therefore,an appropriate amount of Zr doping can greatly improve the mechanical properties of binary TiN coating,and the doping of Zr element can also improve the corrosion resistance and friction and wear resistance of the coating.This is mainly because the atomic radii of Ti and Zr are quite different.During the formation of alloy-nitride,Zr atom in TiN phase is strengthened by solid solution,which leads to the increase of lattice distortion and hinders the movement of dislocation,The coating is strengthened by solution,so as to improve the overall properties of the coating. |
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