Research On The Measurement System Of Motion Error Of Guide Rail And Its Key Technology

Due to manufacturing and assembly errors,each axis of CNC machine tool inevitably has six degrees of freedom geometric errors.However,traditional optical instruments usually can only measure one or two errors once.Therefore,this paper designs a five-degree-of-freedom motion error measurement system for precision moving platform based on laser collimation principle,taking low cost,easy integration,simultaneous measurement of multi-degree-of-freedom errors,convenient adjustment and operation,and meeting precision requirements as the starting point.Firstly,the optical structure of the measurement system is selected based on the principle of simultaneous measurement of five-degree-of-freedom errors of double parallel beam method.Secondly,the design of the whole system is carried out,including the overall system structure design,the hardware design of the IV transformation and amplification module,and the program software design of additional functions such as beam leveling,spot position display and automatic sampling.Finally,aiming at the problem that the double beam is difficult to be leveled and affects the measurement of the roll Angle error,a level instrument is proposed to compensate and correct the roll Angle error,and each performance of the measuring system is tested and compared with the precision of commercial precision instruments to verify whether it meets the requirements of accuracy.A series of tests and comparison experiments show that the measurement resolution of straightness,yaw pitch Angle and roll Angle error is 0.05?m,0.1 "and 0.1",respectively.The stability of the measuring system is within 0.5?m,0.5 "and ±1" within 10 minutes,respectively.The measurement accuracy is up to 0.8?m,0.8 "and 1.5",respectively.