Design And Implementation Of Computer Monitoring System For Vacuum Ion Coating Equipment

Vacuum ion coating is a processing technology for making thin films on the surface of materials.The process of thin film Making in vacuum is complicated,and many industrial parameters need to be control.Ion coating process has the characteristics of coupling,time-delay.It is difficult to realize process stability control and efficiency by manual operation.Therefore,by using computer control technology and network technique for Ion coating production process to realize the production process automation and improve production efficiency and product quality.Moreover,it is important for monitoring system study and develop.First of all,based on the research and analysis of the film formation principle and coating technology,the key factors affecting the quality of the film formation and the design purposes of the monitoring system are summarized.Based on this integration of related equipment and ion beam assisted deposition technology,the overall plan,process unit and work flow of the monitoring system are designed and implemented.Secondly,the design and implementation of the exhaust gas monitoring unit,substrate heating monitoring unit and film thickness monitoring unit that affect the quality of film formation are described in detail.Finally,design and implement the system's software.Design exhaust monitoring system.Based on two-stage pumping equipment,a step-by-step exhaust strategy is used to monitor the vacuuming process of the chamber.Design and implement the substrate temperature monitoring program.Based on the two-degree-of-freedom PID technology,the temperature control PLC function block program is programmed,and the monitoring of the substrate heating process is realized on this basis.The design and implementation of the film thickness monitoring program is based on electrical and optical principles.The PID parameter tuning formula of the crystal film thickness meter(evaporation source power control)and the method of obtaining the Z parameter(improving the crystal detection accuracy)under various working conditions are given.Improve the conventional optical film thickness monitoring algorithm process,and introduce the wavelength search method for the measurement difficulties of the irregular film system in the optical film thickness,and program to realize the regular/unregular film system monitoring process.The software design and development of the PLC program,human-computer interaction,and the automated monitoring process.Using PLC programming technology to make PLC flow control program.Using terminal programming technology to make PT program.Using GUI programming technology to make process monitoring program.Research and analyze the Fins protocol,and use network programming technology to make the Fins communication function between the host computer and the PLC.After software and hardware debugging,the results show that the coating system has high working efficiency and good stability,and can meet the requirements of ion beam assisted deposition coating.