Research On The Growth Of Silicon Nanowires Based On Dip-Pen Nanolithography

Nano-technology,as one of the pillars of the world's high-tech fields today,has gathered scientific issues on the nanoscale in many modern fields.It is also considered to be the most important and one of the fastest-growing frontier fields,giving birth to a new generation of scientific and technological revolution.This project uses the combination of "DPN technology","gold nanoparticle preparation technology" and "silicon nanowire catalytic growth technology" to propose a method for preparing controllable nanoscale catalytic growth of silicon nanowires for the first time.The DPN technology is used to distribute the mixed solution of chloroauric acid and glycerol on the silicon wafer,and the gold nanoparticles are obtained after heating and reduction,which are used as the metal catalyst for the growth of silicon nanowires.Since the growth catalyst is controlled to reach the nanometer scale,the growth range of the silicon nanowire is limited to the nanometer scale,and the preparation of a small scale or even a single nanowire is realized.First,analyze the mechanism of DPN technology,the chemical principle of gold nanoparticle preparation,and the experimental principle of silicon nanowire growth and establish a model.Use Fick's law of diffusion and Young-Laplace equation to analyze the conditions and process of liquid bridge formation,and at the same time explore the metal-catalyzed silicon nanometer Factors affecting wire growth specifications.Secondly,build the experimental platform for silicon nanowire growth,including AFM nano-operation platform,automated microfluidic processing system,and silicon nanowire growth system.The AFM nano-operation platform includes a probe module,a motion control module,a visual positioning module,and a signal processing module;the automated microfluidic processing system includes a pneumatic module,a motion control module,and a visual positioning module;the silicon nanowire growth system consists of a tube furnace,Nitrogen system,and drying module,etc.,provide a growth environment for silicon nanowires.Finally,the experimental verification of the preparation of DPN controllable nanostructures is carried out.Use DPN technology to prepare gold nanoparticles,explore the influence of environmental humidity on the DPN liquid bridge,find the best environmental humidity for DPN experiments,explore the influence of distribution time and precursor concentration on the preparation scale of gold nanoparticles,and find the most stable,The smallest combination of process parameters.The obtained gold nanoparticles are grown silicon nanowires using a solid-liquid-solid catalytic growth mechanism.This article provide a low-cost and reliable small-scale silicon nanowire growth method,which provides technical support for future applications such as single-point growth of silicon nanowires and preparation of nano-devices.