Finite Element Numerical Analysis And Experimental Study Of Macro Micro Drive Linear Piezoelectric Motor

The existing macro-micro drive usually adopts a method in which the macro drive and the micro-drive are independent and superimposed,and the voice coil motor and the piezoelectric motor are used together to drive,which causes the system to be bulky,complicated in structure,and difficult to integrate,so it needs to be studied by previous researchers.Based on the precision positioning system,a new type of precise positioning system with simple structure and easy integration is studied.The V-type ultrasonic motor has the advantages of fast braking characteristics,large output power,no electromagnetic interference and self-locking of power failure.Compared with the existing macro-micro drive control platform,it also has the characteristics of small size,simple structure,easy integration and control.In view of this,this paper uses V-type ultrasonic motor as the research object,and on the basis of the existing macro drive,DC excitation is applied to realize macro-micro drive.The main work of the thesis is as follows:(1)Using the three-dimensional modeling software to model the four angles of the V-type composite vibrator are 60°,90°,120°,180°,respectively,and use the finite element analysis software ANSYS to analyze the excitation motion of the motor.The angle change drives the amplitude and motion trajectory of the foot.Through simulation experiments,it is found that when the angle of the composite vibrator is 60°,the speed of the motor mover is small;when the angle of the composite vibrator is 180°,the speed of the mover increases;When the angle of the composite vibrator is 90°,the output speed and output force of the motor are both large;(2)Simulation experiments were carried out on alternating vibrating and alternating current plus DC excitation of four different angled composite vibrators.The variation law of rotor output displacement,velocity and thrust under different excitations was studied,and the structure of the motor was optimized.(3)Established the dynamic model of the motor in the macro motion,and analyzed the principle of the macro drive motor;(4)Through the experimental study of the prototype,the stroke,driving force,speed and accuracy of the macro drive were tested and the experimental data analysis was carried out.The relationship between the preload force and the resonant frequency was tested and analyzed by stepping motion.Under the excitation of square wave and sine wave,the relationship between the displacement of the mover and the amplitude of the driven foot and the number of pulses is measured.The experimental results show that the V-type linear ultrasonic motor can basically realize the large-stroke macro drive and the high-precision micro-drive under the excitation of the macro-micro-drive,and initially realize the large-stroke precision positioning of the V-type ultrasonic motor.