Study On Influencing Factors And Comprehensive Evaluation Of Energy Consumption Of Clean Air Conditioning System In Chip Workshop

With the development of the information industry,the development and production of semiconductor chips has become an important object of attention at the national level.Although the current technology and related design and operation specifications of chiptype clean workshops can ensure the requirements of the parameters of the clean environment,the energy consumption per unit area is several times that of conventional public buildings,and there is no systematic method for energy-saving evaluation in China.In this paper,starting from the operating characteristics of the air-conditioning system of chip-type clean workshops,theoretical analysis,actual measurement analysis and simulation research are conducted on the influencing factors of energy consumption and energy efficiency,respectively,and a comprehensive evaluation level index system of chip-type clean factory air-conditioning systems is initially formed.First,from the perspective of theoretical analysis,the article analyzes the influencing factors of the load,energy consumption and energy efficiency of the air-conditioning system of the chip-type clean workshop,and forms a logical map of various influencing factors,which provides analysis directions for subsequent measurement and simulation research.In addition,the theoretical feasibility basis based on unit clean air has been preliminarily established.Afterwards,a year-long winter working condition,transitional season working condition and summer working condition were tested and researched on a chip-like clean workshop in Zhuzhou.The study found that the clean areas of the project have good environmental protection,but the pressure difference between adjacent rooms and the number of air changes are relatively high.The energy consumption of the air-conditioning system reaches nearly 30% of the overall energy consumption,of which the refrigeration station accounts for about 20% of the total power consumption.The season and operation energy efficiency fluctuate greatly,the purification air-conditioning system accounts for7%,and the power consumption of process production equipment The largest proportion is about 50% or more,and the energy consumption of the last two items is stable throughout the year.The energy efficiency ratio of the freezing station is less than 3.3under all test conditions throughout the year.The main problems are large pump selection,cooling machine evaporation approaching temperature,and small cooling machine load rate.The excessively large fresh air volume and supply air volume of the purification air conditioning system are the main factors for its high annual energy consumption.After calculation and analysis,the unit clean air cooling load of the chip-type clean room is relatively stable in different levels of clean rooms,basically between 17.6-20.5 k J / m3,from which the cooling room cooling capacity x and air supply volume y The relationship is: y = 18.7367 x + 52.2171,and its coefficient of goodness-of-fit determination R2 reaches 0.9871.This index is only related to the amount of clean air supply,and the load can be estimated for a single class clean room or the entire clean plant.Next,through Design Builder for typical building simulation analysis,the factors that have a greater influence on the power consumption of the air-conditioning system of the chip-type clean workshop are: the COP of the cold machine,the number of air changes and the amount of fresh air.11.2% energy saving rate.Finally,based on the above research conclusions,a preliminary evaluation index for the chip-type clean workshop air-conditioning system has been formed,which is mainly divided into three parts: environmental safety index,energy consumption evaluation index and energy efficiency evaluation index.First of all,environmental safety indicators mainly include indoor temperature,relative humidity,cleanliness and indoor and outdoor pressure difference.Subsequently,the energy consumption evaluation index uses unit clean air as the standard,which mainly includes four items: unit clean air cooling load,unit clean air fan energy consumption,annual unit clean air fan energy consumption,and annual unit clean air power consumption,covering typical test work.Conditions and cumulative operating conditions throughout the year.Finally,the energy efficiency evaluation index is divided into two parts: refrigeration station and purified air conditioning system,and each part is divided into three levels: system energy efficiency index,equipment energy efficiency index,and problem index.Through this index system,it is possible to analyze and locate the operation problems of the air conditioning system layer by layer,helping to optimize and improve energy saving.