Design Of Stiffness-adjustable Test Platform For Voice Coil Motor Characteristics Under Loads

The microelectronics industry is becoming more and more important in the national development.In the information age,the microelectronics technology has brought a great impact on the production and life of human beings.In essence,the core of microelectronics lies in the manufacture of its integrated circuit chips.With the increasing miniaturization of circuit chips,the demand for precision manufacturing,that is,precision and ultra-precision machining technology,is becoming more and more urgent.Precision and ultra-precision machining technology is inseparable from micro-positioning technology.The realization of micro-positioning technology depends on the support technologies,including:micro displacement driver,micro displacement actuator,displacement measurement and control methods.The micro-displacement driver is the key part of the micro-positioning platform.In this paper,basing on the current research progress of the innovation team in the high speed precision movement field and the actual problems encountered during the research,relying on the realities of the research group and considering the nowadays state of development of the micro displacement actuators for precision manufacturing,an in-depth study of the problems of the micro displacement driver’s dynamic properties requirements,encountered during the micro displacement driver model selection,as well as the problems of stiffness and flexible hinge platform frequency matching were performed.Taking Akribis AVM series voice coil motor as the starting point,the dynamic performance of voice coil motor was tested and studied.This provided the basis for the selection of flexure hinge platforms with different frequency and stiffness at the beginning of design,as well as for matching its dynamic performance with voice coil motor.In addition,in order to achieve a wide range of stiffness and frequency adjustment,the stiffness of flexure hinge was adjusted by the moving support,and a clamping force adjustment and support device based on the flexure hinge was proposed.Firstly,this paper discusses the research background and significance of the micro-positioning platform in the precision positioning technology,and then points out problems and complications encountered during selection of the appropriate micro-displacement driver while performing design process of the micro-positioning platform.The solution method was presented in this paper.Secondly,basing on the"Test platform with adjustable stiffness for the voice coil motor characteristics under loads"^[1]invention patent,a structural design scheme of the test platform with adjustable frequency and stiffness for voice coil motors under loads was proposed.Creo3D modeling software was used to design the structure of the abovementioned platform.To verify the correctness of the equivalent model,selection and determination of the material type for the designed platform,calculation and analysis of the working principles of each part of the platform,usage of the beam model to calculate the working stiffness and working frequency of the platform,static and dynamic analysis of the main part of the platform were conducted by the means of Ansys Workbench finite element analysis software.At the same time,according to the project analysis ideas,similar to the ones mentioned above,a clamping force adjustment and support device based on the flexure hinge was designed,which can implement a large-scale continuous adjustment of the flexure hinge platform’s stiffness.Then,the principle of frequency characteristic test of the system was briefly introduced.In combination with this principle,the method of combining frequency modulation pulse sweep signal with data analysis of fast Fourier transform was applied.The ideal transfer function of the voice coil motor for simulation analysis of the system was derived from the mentioned above,which verifies the rationality of the design ideas presented in this paper.Finally,the physical platform system of the test platform with adjustable stiffness for the voice coil motor under loads was assembled and built,and the different values of stiffness and frequency were set at the test platform.Through the experimental test,the dynamic characteristics curve of the voice coil motor under different values of stiffness and frequency was obtained.Based on the above,a system for dynamic characteristics testing of the voice coil motor was developed.