Research On Double Microsphere Super-resolution Imaging Technology

As a result of the invention of the optical microscope,human science has developed at a great speed.However,the resolution of optical microscopes is limited to200 nanometers by the diffraction limit.How to break through the optical diffraction limit has become an inevitable requirement for the development of human science.In2011,an uncomplicated super-resolution imaging method was proposed: microsphere super-resolution technology.This technology directly deposits microsphere lenses with a size of several micrometers to tens of micrometers over the sample to be watched,and at the same time,combined with traditional microscopes,super-resolution imaging can be achieved.Based on the superposition of lens groups in geometric optics,this paper uses the superposition of double spheres to achieve super-resolution imaging of the sample.First,in line with the imaging theory of geometric optics,the magnification of double-sphere structure is derived.Then use ZEMAX software to simulate the single ball and double ball structure.The influence of the measurement,working distance and distance of the ball lens on the imaging when a single ball is formed into a virtual image and a real image are analyzed by simulation.Next,in order to control the position of the microspheres,the inverted pyramid structure supporting microspheres is fabricated using the anisotropic corrosion properties of(100)silicon.This paper analyzes the effects of the concentration of the corrosive solution,the proportion of additives,and the temperature on the corrosion results,and the most ideal corrosion condition is determined to manufacture the structure required for the experiment.Since the etched silicon chip is fragile,the corresponding mechanical structure is further designed to support the silicon chip.The imaging system is used to perform imaging experiments on a single 480 micron Polymethyl Methacrylate(PMMA)microsphere in a 1 micron grating structure.The effects of the size of the ball lens,the working distance,and the distance between the balls on the imaging when a single microsphere is formed into a virtual image and a real image are analyzed by experiments,the experimental results are consistent with the simulation results to a great extent.The combination of a 480 micron single PMMA and a 3 mm K9 ball lens is selected to image the 500 nanometer column and integrated circuit.Experiments prove that different sizes can be distinguished by changing the position of the ball lens.And the double ball structure also makes a prominent promotion to ameliorating the resolution and increasing the field of vision.Finally,the imaging of the Blu-ray disc is realized by the combination of a single PMMA of 480 microns and BTG microspheres.Based on the superposition of lens groups,this paper studies the imaging characteristics of the double-sphere structure and realizes super-resolution imaging.This research greatly improves the microscopic ability of the objective lens and provides a new method for microscopic imaging.