Optimization Design Of Micro Vibration Control Support Structure For Coating Equipment In An Electronic Workshop

With the rapid development of LCD industry in China,the requirements for the surrounding environment of precision equipment in this kind of factory are higher and higher.The slight changes of temperature,humidity,cleanliness and micro vibration inside the plant will directly affect the yield of LCD panel production,thus affecting the production efficiency of the plant.The micro vibration control of precision equipment in electronic workshop is very complex,and the micro vibration control of a kind of precision equipment which contains both vibration components and precision components is more complex.The coating equipment studied in this paper is this kind of equipment.Due to the limitation of its own process conditions,its internal vibration generating parts and precision parts need to be placed on the same foundation,and the foundation needs to have a certain stiffness,especially to meet certain dynamic stiffness requirements.Therefore,it is necessary to study the micro vibration control technology from the perspective of improving the dynamic stiffness of the foundation structure of precision equipment,so as to put forward a reasonable structural design scheme.In this paper,under the requirement of micro vibration momentum level,the vibration velocity response of the foundation floor where the coating equipment is located in the built workshop is measured,and the frequency domain relationship between the actual vibration velocity response of the floor structure where the equipment is located and the allowable vibration standard is studied.After comparative analysis,it is found that the vibration velocity response of the equipment foundation in the built workshop under the operation state of the coating equipment exceeds the standard Frequency range.Secondly,through the actual measurement and analysis of the dynamic stiffness of the foundation floor where the coating equipment is located in the built workshop,the value of the dynamic stiffness of the structure at different positions of the floor is obtained,so as to find the position of the minimum value of the dynamic stiffness of the floor,and take this position as the benchmark for the subsequent optimization design of the floor structure.Thirdly,through the formula derivation and solution,the vibration velocity response of the equipment foundation under the running state of the coating equipment is calculated to meet the dynamic stiffness of the floor under VC-C condition.Finally,the dynamic finite element model of the floor structure is established to study the model parameters and explore the improvement of the difference of the calculated values of the dynamic stiffness of the model.By changing the floor thickness,opening rate and opening layout,the influence of the dynamic stiffness characteristics of the floor is studied,so as to obtain the floor structure design size under the condition of dynamic stiffness to meet the requirements of coating equipment,and the engineering verification is carried out.Based on a built electronic factory building project as the background,this paper measured the vibration velocity response of the equipment foundation and the dynamic stiffness of the floor after the operation of the coating equipment in the factory building,and then compared with the allowable vibration standard of the equipment,proposed the dynamic stiffness of the place where the equipment is placed in the floor under the standard,based on which the floor structure of the micro vibration control foundation of the coating equipment is optimized Design.