| In the 21st century,with the increasingly urgent desire for space exploration,the performance of optical instruments in aerospace,laser radar and other fields has been gradually improved.Small and simple optical imaging systems are no longer enough to meet human observation needs and imaging needs.In this situation,the advantages of large aperture optical imaging systems are gradually highlighted.Under the leadership of the physics discipline,the optical field has gradually entered the human sight.As the competition in the optical industry market is more and more fierce,the aperture,lightweight degree,processing precision,production efficiency and production cost of the optical mirror have issued a new challenge.In the research of large aperture optical imaging system,the processing technology of large aperture optical components has been explored as the focus of research by various institutions at home and abroad.Polishing as an optical element has entered the important stage of nanoscale processing.It has always been the focus of research in the field of ultra-precision optical processing and manufacturing at home and abroad.Since the traditional manual polishing has been unable to meet the processing requirements of contemporary optical mirror,since the 1970 s,the computer has gradually become the main equipment for scientific research and data calculation,and the deterministic polishing technology represented by the computer-controlled optical surface shaping(CCOS)technology has emerged at present,deterministic polishing technologies include CCOS small grinding head technology,stress disc polishing(SLP)technology,magnetorheological polishing(MRF)technology and ion beam forming(IBF)technology,etc.In practical application,each of them has its own advantages and disadvantages.Due to the industrial robot has the advantages of large workspace,low cost,high flexibility,small footprint,strong synergy and so on,it has a good effect on improving production efficiency and reducing manual operation requirements,and plays a positive role in large-scale and mass production.With the industrial robot technology gradually mature,positioning accuracy,bearing capacity,speed and other properties have been greatly improved,to industrial robot as a carrier of the processing technology has been widely used.In recent years,with the development of industrial robots,the research on polishing end structure carried by industrial robots has been gradually carried out at home and abroad,and the corresponding research results have been obtained.Current CCOS polishing technology used in the common polishing tools for swing type,the structure of the planetary polishing,but as a result of such structure research taking the contradiction between the radius of curvature radius and workpiece limits the efficiency of polishing,and remove the function,there are some defects in the polishing process produces the edge effect,caused by polishing workpiece "side" or "become warped edge".Due to the occurrence of edge effect,the spherical wheel polishing structure was born and gradually showed advantages.Its contact with the optical mirror can make the removal function present a "Gaussian" distribution characteristic,which attracted widespread attention.Due to spherical polishing structure at present,both at home and abroad research time is not long,is in the experimental stage,in the polishing process of optical element has not been widely used,the existing structure of spherical polishing polishing pressure control research,the polishing path on the distribution of pressure distribution function is not stable,and the existing common for around a single spherical wheel polishing structure on its axis.The study on the combination of biaxial public rotation and direction of motion is relatively rare.This topic in optical machining process for the actuator at the end of the spherical wheel polishing needs as a starting point,combining with the current aerospace and other fields of large-caliber optical processing and high accuracy,high productivity,the urgent needs of the development of integration,mechanical,electronic,optical,computer control,aim to develop a can provide stable polishing pressure,Moreover,the spherical wheel polishing end-effector with specified design input parameters can meet the intelligent polishing requirements of optical processing in the 21 st century.Through seven chapters on the topic of background introduction,theoretical basis,main structural design,structural strength check,finite element simulation,robot operation,practical application and other aspects of the detailed introduction.To improve polishing accuracy and gaussian removal function,the research target of this article is based on the theory of deterministic CCOS polishing and the removing function after optimization,design a suitable for installation on the six degrees of freedom robot,structure,small volume,light weight,has the common rotation speed ratio is adjustable,the overall modular spherical polishing tools,and carries on the finite element analysis,complete process optimization parameters.Finally,the rationality of the structure was verified by the fixed point polishing experiment and the whole lens polishing experiment.Through the fixed point polishing of the Φ15mmm plane mirror and the whole surface polishing experiment of the spherical Φ600mm aspheric mirror,it is verified that the spherical wheel polishing end actuator designed in this subject has good fixed point repair and mirror polishing ability,and good processing results are obtained.The purpose of this project is to conduct beneficial technical research for the development of ultra-precision optical polishing equipment technology,promote the new pattern of intelligent optical processing combining the processing of large aperture optical elements and industrial robots,and lay the foundation for the industrialization of high-end equipment in the field of optical processing. |