| Cell detection has always been an important step in biological exploration.In traditional biology,cell detection means include flow cytometry,immunofluorescence cytochemical staining,and Elisa,these methods have problems such as long cycle,high cost and complicated process.Cell-based biosensors also have important applications in Water toxicity or quality monitoring,microbial drug susceptibility analysis,cancer research,clinical and health care applications,Food safety and technology,and,pharmaceutical and pharmacological research.At the same time,the electric field distribution of capacitance sensor is not uniform which accuracy is difficult to guarantee.Cell attached on the sensor surface usually by antigen/antibody binding,which has a high cost of antigen antibody and low temperature refrigeration.This paper proposes a new type of capacitance sensor,which has the following contributions:1.It is a capacitive biosensor based on CMOS.The electrode surface is exposed to the packaging layer by open-cavity forming method,which is suitable for mass production2.The 3D fully symmetrical gold-plated electrode structure increases the electrode thickness compared with the traditional asymmetric lithography gold-plated interdigital electrode,and the electric field distribution is uniform,which has the uniform performance and high test-accuracy.3.The chemical molecule glutaraldehyde used to capture cells.4.Assemble the microfluidic chip on top of the chip to precisely control the injection speed and the volume of the test solution5.Upgrade software to capture capacitance data under multi-voltage and multi-frequency of sensor.6.Based on the multi-group data,we found the best voltage and frequency test conditions by comparing and analyzing the multigroup data.Under the best test condition,the logarithm of cell concentration is linear with the change of capacitance.Secondly,we use the machine learning to classify multiple sets of data of the two types of cells with 99.71% accuracy. |
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