Research On Self-calibration Mechanism And Optimal Of Micro-angle Measurement System

Aiming at the current situation of lack of micro-angle self-calibration measurement technology research in our country,on the basis of F-P multi-beam interference to achieve micro-angle measurement method,the data processing and error cause of this method were optimized,and the self-calibration measurement method based on this method was studied.The main research contents of this paper are as follows:(1)Optimal design of micro-angle data processing algorithm.The optimal design of the method for obtaining the peak coordinates and the method for obtaining the ring information in the data processing algorithm is carried out.The effects of three different weight factor models on the calculation of peak coordinates in local multiple regression were compared in experiments,and a relatively suitable weight factor model was obtained.The sampling methods of peak coordinates and the ring information obtaining methods are optimized,which effectively improves the calculation accuracy of the center coordinates.(2)Error simulation analysis of micro-angle measurement system.The influencing factors in the micro-angle measurement system were analyzed.On the basis of studying the influence of temperature change and the nonlinearity of the focal length calculation model on the angle measurement results,the influence of focusing error and component attitude error on micro-angle measurement results is mainly analyzed.The algorithm error and temperature and humidity error of the extra fraction method are simulated,and the calculation result of F-P interval is corrected,which effectively improves the measurement accuracy of micro-angle.(3)Micro-angle measurement experiment and comparative experiment.The experiment compared the influence of two imaging objectives with different focal lengths on the micro-angle measurement results.The results show that in the measurement range of 300 ″,the micro-angle measured by the imaging objective with focal length of 80 mm is more accurate,and the micro-angle measurement uncertainty obtained by the repeatability measurement is better than 0.060 ″.Compared with the ELCOMAT HR photoelectric autocollimator,which verifies the reliability of the results of the measurement device.