Research And Development On The Open Worktable Control System For Immersion Device

Immersion lithography has been catching more and more spotlights, considered as competitor to next-generation lithography technics. Our study group has been engaging in immersion device for several years and finds the research of the dynamic edition of Immersion Unit requiring steady and open experimenting environment to implementing simulation of the lithography and flexible compilation of the lithography routine. The open numerical control system has many advantages, such as high flexibility, low cost, facility to promote, expand and introduce the newest PC technology of software and hardware etc. In view of these advantages and requirement of the dynamic injecting-water experiment, the main work of this thesis is made up of establishing, achieving of the high precision as well as software developing of the open-architecture worktable control system.The first chapter introduced background, concept, functions as well as advantages of the open numerical control system and summarized the research work and progress in this field. Afterwards, the significance and content of the thesis were presented.The second chapter analyzed structure of the lithography equipment and requirement of the experiment and then designed a set of open-architecture worktable control system which is mainly made up of PC and PMAC (Programmable Multi-Axis Controller). Each module's function and principle of the control system were introduced and connection process of the hardware was presented. At last, control mode of the system was determined after analyzing the requirement.The third chapter introduced work principle of the system software and technologies in the process of software developing. Then software system based on .NET Framework was developed and the process was elaborated. The software system was made up of Man-machine interactive compilation of the routine, automatic build of the program as well as the data real-time gathering and plotting etc. In addition, the interpolation of three transects curves and the uses of PLC were introduced.The fourth chapter introduced "I" variable establishment of the PMAC and mathematical model of the control system, optimizing the control parameters. Then, adaptive control arithmetic was realized in the control system to achieve requirement of the dynamic injecting-water experiment.The fifth chapter concluded the thesis and suggested the future research work.