Research On Hydraulic Cavitation Gas-liquid-solid Three-phase Abrasive Flow Polishing Tool And System

With the development of electronic information technology,optical and semiconductor components are increasingly used,and efficient and ultra-smooth processing of optical materials and semiconductor materials has become increasingly important.In order to solve the problem of low efficiency of traditional abrasive flow polishing,a hydrodynamic cavitation gas-liquid-solid three-phase abrasive flow polishing process is proposed.This method utilizes the heterogeneous venturi structure to generate cavitation effect,and the micro-jet generated by cavitation accelerates the grinding.The collision of the particles with the workpiece,thereby improving the efficiency of the abrasive flow polishing.The main work done in this paper is as follows:(1)Theoretical research: On the basis of the original work of the research group,the bubble is directly passed into the soft abrasive flow to form the gas-liquid-solid three-phase abrasive flow,and the mechanism of cavitation is analyzed,and the structure of the conventional venturi is tried.After the transformation,the modified venturi tube spontaneously cavitation generates bubbles,and the bubble collapse effect is used to improve the material removal.(2)Numerical analysis: Based on the mixture flow calculation method,the fluid kinematic model of gas-liquid two-phase flow is established by using the realize k-? turbulence model and the Singhl cavitation model,and the results are verified by numerical simulation results.The feasibility of the cavitation structure,and the characteristics of the flow field and cavitation characteristics are clarified,and the optimized structural size is selected,that is,the angle a in this paper is 55°,the size of the LB is 0.9 mm,and the size of the LC is taken.1.0mm.(3)Experimental platform design: Based on the structural characteristics of the heterogeneous venturi,the corresponding mechanical structure was designed,and a complete set of fully automatic circulating gas-liquid-solid three-phase abrasive flow processing experimental platform was established,including the verification of stability and safety strength of the pipeline.According to the results of numerical simulation,the flow rate is controlled accordingly,and the fuzzy PID control system is designed.It is verified in the experiment that the hydraulic cavitation gas-liquid-solid three-phase abrasive flow can process the workpiece and increase the flow rate by increasing the proportion of cavitation areas.The heteromorphic venturi cavitation structure proposed in this paper indicates that the problem of high material removal is well solved,and the feasibility of efficient and ultra-smooth processing of optical materials by hydrodynamic cavitation gas-liquid-solid three-phase abrasive flow polishing technology is verified.This technology has broad prospects.