Study For Bearing In Magnetron Sputtering Deposition Technology And Mechanical Behavior Of The Material

With the development of shipbuilding and motor industry,the demand of capacity of power and rotate speed of engine is higher and higher. So working property of wearable part as bearing and lining has been required more strictly. For example,the limit load for new diesel engine demands higher than 400N/mm2. In the same time,life span and the working reliability is ensured during running time. The bearings made in traditional way cannot satisfy the demands,and even the best thin slots bearing cannot meet above demands of fatigue strength and wearability. So we must seek for new coating technique and new wearable material to improve wearability,load property and adaptability of bearing material,to suit for the development of productivity.Sliding bearing not only pass working force,but also sustain high surface velocity,which require the material to have soft parts,in order to obtain fine working behavior and difficulty to damnify by extra impurity,and have hard parts to acquire fine wearability and fatigue strength. So the reasonable way to improve bearing property is to create a kind of new bearing material,which has fine microstructures,that is,grains of the soft parts and hard parts are as thin as possible and metallographical tissue is uniformly distributed.According to such idea,Miba Gleitlager AG in Austria hasdeveloped a series of new bearing materials and acquired patents. These materials have very fine friction characteristics. The key technique is to sputter a kind of material,which has special texture such as AlSn20 etc. This kind of new bearing belongs to the fourth generation products of sliding bearing. Only the U.K.,Austria and a few developed counties can produce this kind of bearing. So the price is very high. Our country cannot produce such coating bearings at present. Factories,which produce bearings in our country,are few and they still use the traditional way and have not solved the problem of the substitute of imported bearing.In order to master the new bearing material technique as fast as possible,we study theoretically and experimentally by using use the homemade device,and at last we successfully obtained the technical parameters. The trial-manufacture coating bearing material property has basically reached the property standard of the production from Miba Corporation. This technique can not only resolve the problem but also renew the bearing. We can antipasti that by using magnetron-sputtering technique there is a very fine applied foreground after new generation bearing appears. The magnetron sputtering coating technology and the surface topographies,mac-rostructures and hardness of the new bearing coating material AlSn20 are studied and analyzed in this paper. It lays a foundation for further research of new bearing materials.Innovations are expressed as follows:Experimental research indicates that such factors as argon pressure,slice temperature,target temperature,sputtering voltage have important influence on film performance made by magnetron sputtering. We can acquire ideal new material,which can be used on new generation coating bearing through choosing appropriate technical parameters.Backward rectangle bar target was invented. It not only made 20% increase in utilization,but also fulfilled a new technology that can sputter Ni target and AlSnZO target respectively in the same room through operating vacuum one time only.Coating bearing material acquired by experimental research and technical study achieved performance of the most advanced bearing in the world in such aspects as surface topographies,structure,mechanical performance and so on. It can replace imported bearing completely.We acquired a new technology of magnetron sputtering bearing through theoretical and experimental research,which filled up technical vacation in this field in our country,started a new magnetron sputtering bearing field,so it has wide application foreground.