| As the key step of nano-technology, stepping piezoelectric precise driving technology is one of the hot research fields of modern precise driving technology, and is improved towards high-precision and high-resolution with the emergence of some new methods, new principles and new technologies.In this paper, a detailed analysis and study for the stepper piezoelectric micro-moving stage with both external and inner driving is done through their working principles,movements and kinetic models. Both the External-micro-moving stage and inner-micro-moving stage nano-stepper piezoelectric micro-moving stages'structure is designed, the External-micro-moving stage nano-stepper piezoelectric micro-moving stage is based on the new "push-pull" principle, the driving force of piezoelectric ceramics is loading on the stage's platform directly through the reasonable arrangements of the actuator's position, thus ensuring the system's stiffness and gaining larger driving force and range. A new STM samples transferred system is proposed, and the structure of its inner-micro-moving stage is designed. Dynamical structural model of the piezoelectric micro-moving stage is built, and the intensifying and driving institutions'stress is analyzed theoretically. Finite element analysis software ANSY is used to analyze the static and modal characteristics of the piezoelectric micro-moving stage and get its displacement,stress distribution,driving ability,natural frequencies and mode shapes. The structure of External-micro-moving stage micro-stages is stimulated, and the influence of structural parameters on it is analyzed, thus, its natural frequencies and mode shapes are got. Through the orthogonal experiment method, the optimal conditions impacting the natural frequency and the amplitude is gained, among which the width of the guide rail's impact is greater. The optimal design parameters are: the object stage's 10mm height , 5mm thickness, width 55mm, the height from the base to the connecting block 4.4mm. Through the stepwise regression analysis, external-micro-moving stage nano-stepper piezoelectric micro-moving stages'4 factors and the multiple regression equation of the natural frequency are established, and the quantitative analysis is of great value for the design and control of nano-stepper piezoelectric micro-moving stage. The design of the driving control system of piezoelectric micro-moving stage is finished, the PZT power for anti-interference and convenient control is designed. Through the detailed test and measurement of all the parameters of the external-micro-moving stage nano-stepper piezoelectric micro-moving stage, the dynamic model and finite element analysis results are verified, meeting the requirements of nanometer micro-displacement,larger driving force and range. The micro-moving stage's reproducibility experimental results are better, and obtaining uniform steady movement. The micro-moving stage is of good practical application in long-range nanometer measurement machine. STM micro-moving stage experimental control circuits are built, the finite element analysis results are verified through experiments of the internal-micro-moving stage micro-moving stage, meeting the requirements of nano-micro-displacement system, with larger drives and range. The loading force of the micro-moving stage is about 16.7N, stepping frequency is 50Hz, the velocity is 26.4μm/s, and the resolution is bout 8.84nm when the driving voltage is 10V, and it has good long-range stability within the 14mm entire range. The micro-moving stage is used in the STM system, realizing the observation of real-space images of atomic. Additional factors'impact on the micro-moving stage is analyzed, and the relevant solutions and measures are put forward towards the impact.
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