| Yttrium barium cuprate (YBCO) superconducting thin films have been synthesized by metalorganic chemical vapor deposition (MOCVD) on various substrates. The depositions were conducted in a vertical, high-speed rotating (0-2000 rpm) disk reactor which was designed and assembled by this purpose. The 2,2,6,6-tetramethyl-3,5-heptanedione metal chelates of Y, Ba, and Cu were used as precursors, which were transported by nitrogen carrier gas. Oxygen gas was introduced uniformly through the top of the reactor. The films were grown by three different processes. First, YBCO layers were deposited at 500... |
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