Design And Fabrication Of X-ray Compound Refractive Lenses

Planar parabolic refractive lenses are one important kind of compound refractive lenses which are used in the third generation synchrotron radiation sources as an important X-ray device.In this thesis, we reviewed the history of compound refractive lenses(CRL), expound the basic theoretical formula of CRL, and introduce the choice of lens materials. Then on the base of theory of CRL, we derive the theoretical formula of the planar parabolic refractive lenses.In the optical design, a set of 30 micro-focusing planar parabolic lenses with equal apertures of 250μm and equal focal distances of 30cm at 8.05keV is realized, which is designed to be tested at X-ray diffractometer (XRD) and simulated by ray tracing by ZEMAX software. This set consists of different number (from 1 to 30) of individual lenses. The radius of curvature at the tip of the parabola ranges from 1.23μm to 37μm and the theoretical transmission from 43.3% to 33.2%.Ultra violet lithography is used to fabricate the planar lenses from SU-8 photoresist which thickness is 224μm. Measured physical dimension of lenses is coincident with the theoretical one. And after the good study of the characteristic of X-ray source in XRD, a reasonable design of test setup has been made which help to accomplish the test of the optical properties of the lenses. And the focal spot has been achieved which is coincident with the result simulated by ZEMAX software in the same condition.