Preparation Of Self-cleaning TiO₂ Thin Films On Floating Glasses

In this paper a comprehensive introduction of titanium dioxide film, which was focused on photocatalysis and hydrophilicity, had been given. The research background, the self-clean characteristic and some kinds of preparation methods were discussed. A summary about the factors which affect the photocatalysed efficiency and hydrophilicity was made.According to the fact of internal studying on TiO2 thin films resting on the laboratory,unable to be produced cosmically and applied commercially,The paper put forward an aim to deposit titanium dioxide film on glass substrate based on the atmospheric pressure chemical vapor deposition (APCVD) method,combined with the floating glasses manufacturing line ,to offer the academic and experimental support to the cosmical production of self-cleaning TiO2 thin films on glass.Based on the process flow and equipment of the floating glasses manufacturing line,we designed the gas supply system, the reaction system and the flux and temperature controlling system by ourselves.Using the equipment system which we put up and using TTIP as precursors, titanium dioxide thin films had been deposited by APCVD method. The effects of the substrate temperature and carrier gas chroma on the microstructure, composition and properties of the films have been studied synthetically. And we find the process parameter combined with the floating glass manufacturing line.The hydropilicity and photocatalysis of the samples were got.And good academic and experimental supports were offered to the cosmical production of TiO2 films on glass in the future.