Preparation And Properties Of TiO₂ Films & TiO₂/SnO₂:F Multiple Films By DBD-CVD

In this paper a comprehensive introduction of titanium film, which was focused on photocatalysis and hydrophilicity, had been given. The research background, theories and some kinds of preparation methods were discussed, and a summary about the factors which affect the photocatalysis efficiency and hydrophilicity was made. The paper put forward an aim to deposit titanium films and TiO₂/SnO₂:F multiple films prepared by the method of dielectric barrier discharge atmospheric pressure chemical vapor deposition (DBD-CVD).Using TTIP as the precursor, titanium films had been deposited by DBD-CVD method on slide substrates, which had good photocatalysis and hydropilicity. Base on this, titanium films were deposited on Low-E glass preliminarily, and the multiplicity of the functions of Low-Emission and self-cleaning was realized at some extent.This paper systematically analyzed the relations between the preparing parameters such as deposition temperature and deposition voltage and the surface and structure , transmittance, photocatalysis , hydrophilicity of titanium films deposited on slide substrates. Titanium films prepared by DBD-CVD were amorphous when the deposition temperature was low, photocatalysis efficiency and hydrophilicity became low as well. When deposition temperature increased, anatase occurred and surface of the films became uniformity and smooth. Meanwhile photocatalysis efficiency and hydrophilicity increased. When the deposition voltage was low, titanium films were amorphous with low photocatalysis efficiency and hydrophilicity. Enhancing the deposition voltage, the films became thicker and the surface of the films conduced to uniformity and smooth. Meanwhile the crystalline of titanium films were improved with better hydrophilicity and the absorption edge of the films had a red shift effect. The efficiency of photocatalysis was the best when deposition voltage was 100V.The multiple thin films of TiO₂/SnO₂:F were deposited on Low-E glass by series of reaction time. When the time was short, TiO₂ was amorphous, and with the time increasing, the surface of the film became more compact and the crystal type was anatase. When the time was up to 2h, the crystal type of Ti₆O₁₁ appeared. As the time is increasing, the thickness of the film increased, the transmittance of the visible light decreased, the absorption edge of the film drift to long wavelength, the band gap decreased and the photocatalysis and hydropilicity of the films increased first, andthen decreased, and reached the best when the time was 0.5h. Through the theoretical calculation and practical testing, it was found that the sheet resistance increased and the reflection of mid-far infrared decreased with the reaction time rising. And a theoretical analysis was given on the mechanics of the electrical property of multiple thin films.