| Nanometer ITO powders were prepared by homogeneous precipitation method in this paper, with In, SnCl4·5H2O being the raw materials and urea being the precipitant. Thermal analysis, XRD, TEM, IR, UV-VIS and digital bridge were used to characterize the changes of the ITO precursor when being heated, the ITO particle phase, shape, size distribution, optical and electrical property. The influences of nine factors, including reactants ratio , composition, initial pH value, anti-aggregative agent , reaction time and temperature, the dripping method, way of dehydration and sintering temperature, on the particle size, shape and property were investigated systematically, and finally a optimization process was obtained. The study showed that this process, which can produce fine ITO particles, was not only easy to master, but also had a prospect for industrialization. Compared with common ITO material, the particle prepared by this method presented better optical properties due to the small-size effect, which has a stronger reflectivity on infrared radiation ( ≥ 99% ), transmission on visible radiation (≥99.99%) and absorptvity on ultraviolet radiation (ABS≥1.0) .The influence of rare element Nd , when doped into ITO powders, on the particle size , shape and property were also studied. The result showed that within 3% doped amount of Nd2O3, in terms of morphology, the particle size decreased with the increasing amount of Nd2O3;in terms of optical property, the particle presented changes as follows: the infrared absorption peak situated between 500 and 1000cm-1 blue shifted in infrared wave band, no obvious change in visible wave band, absorptvity increased and absorption strip extended in ultraviolet wave band;in terms of electrical property, the resistivity soared as the doping amount increased.
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