Modeling And Simulation Of Scratches During The Process Of Ultra-Precision Plane Grinding

Ultra-precision plane grinding is one of the most important ultra-precision machining methods,it posses very important position in manufacturing and has wide market requirement. Detector lens, computer chip and so on, are machined through ultra-precision plane grinding.During the process of plane grinding, the undesirable scratches will be appeared on the surface of workpiece if the configuration of grinding technical parameter is illogical, such as the dispersion of grains'dimension is much larger or grinding press is selected illogically. Those scratches not only damage surface quality of workpiece, but also influence the capability of workpiece. Those scratches will make workpiece disrepair in the following machining. It appears very important to control and reduce the scratches in grinding machining.In this thesis, theory of scratches formed is analysed and researched from the angle of mechanics. The factors that influence grinding scratches are confirmed and disposed according to practical circumstance at random. The concept of grain size sensitivity is proposed. It is used to quantificationally evaluate the capability of grin- ding equipment in avoiding scratches. Grain size sensitivity has guidance significa- tion in design and use grinding equipment.In this thesis, the depth of grains pressed into workpiece during the process of grinding based on grain size sensitivity is analysed. Through model test, the capability rule of the scratch under the change of inner and outer factors is found out, at the same time, the influence degree of different technical parameters is confirmed, through those practical machining can be directed.At last, a new kind of lapping plate equipped with elastic cell is put forward in this thesis, and its machining characteristic is analysed. It is possible that this equipment can resolve the conflict between grinding scratches and grinding efficiency.