Study On Micro-EDM Technology For Ta-W Alloy

Electrical Discharge Machining (EDM) is a kind of important method in super precise machining area. Its essence is electricity rots. After the half a century of development, EDM has already become one of necessary parts in modern manufacturing technology field. And it is widely applied in the fields of microelectronics industry, aviation and astronavigation, medical equipment and die manufacturing. Along with speedy development of Micro Electro Mechanical System (MEMS) and modern electronics and electric powers, especially after the mature of the on-line manufacture technique of tiny electrodes, micro-EDM technology entered practical phase and received more and more attentions.Ta-W alloy is a heavy metal, which has high strength, high melting point, and can stand very large impact. It has very high extensibility; very good mechanical machining capacity and very strong ability resist rot at high temperature. So it has important application in high tech field.Firstly, through a series of technology experimentation, this paper is carrying on the preliminary analysis to the EDM character of Ta-W alloy. The paper mainly studied the influence of the electricity parameter and electrode materials to the machining velocity and the electrode wastage. Is processed 1Cr18Ni9Ti by electrodes of two kinds of dissimilarities diameter and analyzed machining influence of the electrode diameter to process.Next to that, through contrasted process experiments of Ta-W alloy and 1Cr18Ni9Ti, the paper deeply studied the EDM function of Ta-W alloy, and on the basis of its physical nature, analyzed the difficult and the reason of EDM for Ta-W alloy. Applied suitable machining parameter and way, are processed array holes of 2×2 about 58μm in diameter.In the end, on the basis of electric milling principle, three-dimensional microstructures are machined on Ta-W alloy. Are machined a groove about 43μm in width, a beam about 22μm in width and a foursquare structure with about 30μm length of each side. And is milled structure of HIT in form and etc.