| The rapid development of micro-nano-technology is refining the research subjects continuously. Micromanipulation System is needed in all kinds of areas such as optical, ultra-precision machining and measurement, biological engineering, medical engineering, micro-electro-mechanical systems (MEMS) assembly operation. As a result, micro-operating system has broad application prospects.With the development of science and technology, these areas of the application of micro-operating system has put forward higher requirements, especially the higher demand of the movement accuracy, response speed, force sense, controllability and flexibility. For the micro-operating system, the nano-precision positioning should be concerned, and the large-scale micro-macro dynamic positioning should be paid attention at the same time. In response to these circumstances, domestic and foreign scholars have focused on Macro / micro dual-drive system and have achieved certain results.The topics related to macro / micro integration console system is a new type of dual high-precision six-axis parallel mechanism positioning system which has the advantage of great displacement, rapid positioning, high-precision positioning of compensation. The macro-driven platform which is driven by servo motors completes a major displacement, high-speed, high acceleration of micro-positioning. Acer terminal actin micro-actuator by piezoelectric ceramic is driven by the flexible hinge, realizing nano-scale resolution and accuracy of positioning error compensation. The issues will be discussed in the paper according to the mechanical design, system dynamics modeling, system design, macro / micro control strategy.In institutional design, the positive and negative kinematic equations of macro/micro-motion platform are derived according to the theoretical structure based on virtual prototyping technology. The results of simulation about the positive and negative kinematics, dynamics of the micro-motion platform have verified the theoretical derivation is correct.In the system dynamics modeling, the dynamic input is involved with the flexible link. The establishment of flexible hinge model through the finite element method, combined with the dynamic simulation software to establish a more accurate hybrid rigid-flexible dynamic model to solve the analysis. Thus it will get closer to the true system dynamic response and provide a theoretical foundation for the control system design and experimental studies.In the system design, the hardware selection and experimental design have been done after making a detailed analysis about the structural characteristics and control functions of macro/micro motion platform. Based on the LabVIEW software platform, the control system software has been developed.In the macro / micro-control strategy, the macro / micro driven control strategy has been proposed. After considering a variety of control methods, neural network adaptive PID control is used . Besides ,this kinds of control methods have been analyzed. The macro / micro-console-wide closed-loop control system model has been established based on LabVIEW-based data acquisition platform for the six-dimensional micro-displacement sensors. The macro / micro-positioning system for experimental research and performance testing have been finished after constructing the experimental system. The results show that the system can greatly improve positioning accuracy. In this paper, the research work for the macro/micro-driving high-precision positioning system have laid the foundation for further study, as well as related applications may learn from the experience of the theory and practice.
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