Nanocomposite Rainforced Diamond Like Carbon

Diamond-like carbon (DLC) film is widely used in the actual production of the coating, because it has high hardness, good thermal conductivity, high infrared transmittance, low friction coefficient, good biological compatibility, etc., usually used for protective coatings for cutting tools, optical antireflection layer on the various activities of the lubrication layer and the workpiece surface modified layer of biological material. However, due to the sp3 content of DLC films with lower hardness, lower is better lubrication at high sp3 content of their stress is large, making the film and substrate adhesion is poor, and too much stress makes the film thickness is limited, and the DLC and the metal of the thermal expansion coefficient difference between the larger, making the DLC film and the adhesion between the metal substrate becomes poor, which greatly limits the DLC films in practical application. Usually solve this problem is the incorporation of metal elements to the DLC, the DLC films to form metal carbide nanoparticles, these nanoparticles to reduce the internal stress of DCL films, and metal substrates to improve adhesion, but also with the deposition of multilayer approach to solve the problem that, but the inevitable incorporation of metal elements to improve the friction coefficient of composite DLC films, thus reducing its service life. CVD method was also used ultrasound or physical doping methods to the nanoparticles embedded in DLC films, but these methods are too complicated to be practical. In this paper, magnetron sputtering, using Ar ion bombardment of graphite target at the same time in the graphite target and uniform coating of nanoparticles on the way to DLC film deposition of nanoparticles composite. The main idea is divided into two parts.1. By the dispersion of nano-particles of diamond particles in the coating solution evenly on the surface in the graphite target, magnetron sputtering method using nanoparticles embedded in amorphous carbon structure of DLC films, the obtained composite nanoparticles uniformly doped DLC films, through Raman spectroscopy, transmission electron microscopy, X-ray diffraction, a thin film of nano-composite structure, and by changing the doping concentration of nano-particles in the DLC film distribution. In addition, using a nano-indenter, friction testing machine to test the mechanical properties of composite DLC film. This method reduces the doped DLC film stress, improve its hardness. And the preparation method is simple, compared to the metal element doping, the incorporation of nano-diamond particles did not increase the friction coefficient of the film, also reached the same result. This doping method has very good maneuverability, large-scale industrial application value.2. By C60 molecules coated evenly distributed solution of high purity graphite target to sputter the surface, using the method of RF magnetron sputtering deposition of composite DLC films, resulting in C60 molecules embedded in the composite structure of DLC films, but also use of Raman, TEM, XRD analysis methods such as analysis of the film structure, the analysis found that C60 molecules in the film is not complete and there are separate, but form a film filled with graphite structure, and this layer graphite is uniformly distributed in the DLC films were amorphous carbon grid. Found by testing the mechanical properties, hardness and elasticity of the film are not improved. C60 molecules through analysis that led to the reunion too serious to thin films deposited large particles formula C60, or C60 molecules in the sputtering process were Ar-ion bombardment led to the rupture of the film formed a large layered graphite structure. But this method also has a good sense, to further improve the dispersion of C60 molecules in the C60 molecule can be better composite structure, which a good load of DLC films to improve the hardness and elasticity. C60 molecules can also be mixed with other materials to form a composite structure of the films were to study the new structure and properties of the film.In short, this new doping method provides a new doping ideas, making the film on the DLC films were enhanced or other modification of a new research direction, to further broaden the means of doping, makes magnetron sputtering process of doping atoms or ions must be the response level approach to synthesis of nano particles is not the only idea the first time in magnetron sputtering thin film of nano particles composite nanoparticles were introduced direct sputtering approach, which preparation of other nanoparticles for doping methods and interpretation of the structure to provide a reference.