Research On The Preparation Of Diamond-like Films By High Power Pulsed Magnetron Sputtering

Diamond-like carbon(DLC)films have many excellent properties such as low friction coefficient,good chemical stability and controllable resistivity,and have a broad application prospect in many fields.Therefore,it is of great practical significance to carry out the research of DLC films.In this paper,the preparation of DLC films with high power pulsed magnetron sputtering(HiPIMS)was studied.The main conclusions are as follows:(1)The distribution of magnetic field on the target surface under different magnetic circuit structure was simulated by Comsol software.The results show that the distribution of magnetic field on the target surface can be adjusted effectively by adjusting the height of the magnet,the diameter of the magnet and the size of the magnetic yoke.The main magnetic circuit structure parameters of the rectangular planar magnetron sputtering target were determined according to the simulation results,which made the horizontal magnetic field distribution of the target surface uniform,and the maximum horizontal magnetic induction intensity was about 40m T.The magnetic circuit structure provides a good equipment basis for preparing DLC films with HiPIMS and effectively improves target utilization and stability of sputtering process.(2)The process of preparation of monolayer DLC films by HiPIMS was studied.The results showed that DLC films prepared by HiPIMS were more compact and the porosity was lower compared to conventional pulsed DC magnetron sputtering.For monolayer DLC films prepared by HiPIMS,with the increase of bias from 0V to-150V,the surface density of the films increased,porosity decreased,surface roughness decreased,the deposition rate decreased,the sp~3 content in the films increased first and then decreased,and the sp~3 content was the highest when bias was-100V.As the average current of the target increased from 0.30A to 0.50A,there were no large particle defects on the surface of the films,the compactness was good,the surface roughness changed little,the deposition rate increased rapidly,and the sp~3 content in the films increased slightly.(3)The preparation and properties of soft and hard alternating multilayer DLC films were studied.The effect of layer structure on the properties of the films was investigated.The results show that DLC films prepared under high bias(-75V)have relatively higher content of sp~3 hybrid bond;the resistivity of DLC films increase with the increase of the thickness of the high sp~3 content film;the multilayer soft and hard alternating DLC films structure can effectively reduce the internal stress of the films,and the internal stress in the films increases with the increase of the thickness of the high sp~3 content film;the corrosion resistance of multilayer DLC films is obviously better than that of monolayer pure soft and pure hard DLC films.The multilayer DLC films with a modulation ratio of 1:2 have relatively excellent corrosion resistance,its good film compactness and balance between internal stress and structural composition(sp~3 content)effectively reduce the occurrence and diffusion of corrosion,thus exhibiting excellent corrosion resistance.