Research On A Method For Measuring Length Based On Semiconductor Laser Interference

Non-contact, high accuracy, high sensitivity laser interferometer for measuring length is widely used in industrial production, precision machining, industrial inspection, research and so on. With the rapid development of science and technology, Interferometer length measuring techniques of the laser put forward higher requirements, such as small devices, high-precision measurement, and intelligent measurement. Based on semiconductor lasers, computer technology and virtual instrument technology, a laser interferometer method and technique for measuring length with the combination of virtual instrument technology and semiconductor laser is introduced. The method used polarized light interference and virtual instrument technology to achieve the object displacement measurement with simple system configuration, high precision, stable performance, handling intelligence and other advantages.In this paper, the major tasks are as follows:1. Introduced three methods of laser interferometers, and its theory, development status of domestic and abroad of Single-frequency laser interferometer length measurement.2. Proposed a Laser interferometer length measuring method and technique based on virtual instrument technology and semiconductor laser, and introduced the working principle of the measurement system. Used polarized light interference technology for high precision measurement; Used virtual instrument technology to achieve the interference fringe acquisition, process and display real-time.3. Set up the measurement system, the comparison tests verified the feasibility of the system, and analyzed the factors of error in the system. The result shows that measurement accuracy within 10μm in the measurement range of the 200mm.