Study On The Structural Microvibration Response Of A Micro-electronics Workshop

With the fast development of technology, super sensitive equipment is widely used in optics, micro-electronics and semiconductor industries. Micro vibration has become the key factor affecting their common work, so anti-micro vibration methods are needed. Structural anti-micro vibration problem is very difficult because of the randomness of environment vibration and the complicated response it caused on the structure. For the purpose of vibration control, the performance of structural anti-micro vibration must be studied to gain the proper proposal. Concerning anti-micro vibration theory, scholars at home and abroad investigated a lot and focused on vibration isolation, but few on structural anti-micro vibration. Over-all structural anti-micro vibration design is very practical; among which modifying structural stiffness, damping parameters and so on are simple and cheap method.In order to discuss the impact of micro vibration on micro-electronics workshop, this paper simulated the structural micro vibration response of a micro-electronics workshop by using the finite element analysis software Sap2000. It obtained the acceleration time-history curves and corresponding response spectra, which were compared with those from experiment. Besides, this paper also compared a micro-electronics workshop's micro vibration response when it with shear wall and that without shear wall by using Sap2000, discuss the anti-micro vibration efficiency of structural stiffness increase, through which many useful conclusions have been obtained.The results indicate that for both the experimental data and the simulated ones, on the working platform the accelerations at the base of the structure in the horizontal directions have been amplified; the acceleration spectra from the experimental data are similar in shape to the simulated ones, with their peak values in accordance with the fundamental periods of the structure in the corresponding directions; the damping ratio is one of the major factors affecting the micro vibration response of the structure, and there are different damping ratios at different directions; and micro vibration response at each direction can be approximated as a quadratic curve of damping ratio. Besides, increasing shear wall cannot act as an anti-micro vibration factor, in some way, increase in structural stiffness will enlarge the structure's micro vibration response, but it can decrease displace effect.