Research On Vertical Micro-vibration Response Of Process Area Structure Of TFT-LCD Workshop

With the continuous development of production technology for the thin film transistorliquid crystal display(TFT-LCD),the panel size is getting larger and larger,and the processing precision is getting higher and higher.The production equipment of the panel requires more and more strict control of micro-vibration,and the composition of micro-vibration sources is complex.Domestic scholars have done more research on the structural micro-vibration response under the influence of external vibration sources,but less research on the vibration sources inside the factory building.In order to meet the requirements of the production environment for precision equipment,the micro-vibration response of the core process area structure in the factory building under the action of internal vibration source is further studied in this thesis.Based on a practical project,lattice beam structure is adopted in the process area.First,this thesis studies the difference between beam element and solid element in calculating microvibration response of the structure in the process area.By comparing the results of vertical mode,vertical stiffness and vertical harmonic response,it is found that the calculation accuracy of finite element analysis using beam element cannot meet the requirements of micro-vibration design because the structure in the process area is different from ordinary building structure.It is proposed that solid element should be adopted in the vibration response analysis of the structure in the process area.Then,the vibration source inside the factory building is simulated by simple harmonic load,and the micro-vibration response and vibration transmission of the structure in the process area under the action of the internal vibration source are studied,and the three main factors influencing the micro-vibration response are explored——beam height,floor load and shear wall.According to the finite element analysis,the peak value of microvibration response and the law and quantitative value of frequency spectrum in the process area under the action of internal vibration source are obtained.Through research,it is found that under the action of internal vibration source,increasing the beam height can quickly reduce the micro-vibration response of the structure in the process area,which is an effective means to control the micro-vibration response.The dead weight of the equipment in the process area can reduce the micro-vibration response of the structure,and the beneficial effect of the dead weight of the equipment should be properly considered in the micro-vibration design.After the shear wall is set up,the vertical vibration response of the process area near the shear wall will be greatly reduced,and the shear wall can be taken as an important measure to control the influence range of internal vibration sources.Micro-vibration control is an important part of the design of TFT-LCD workshop building and also an important guarantee for the yield of TFT-LCD.It is hoped that the research results in this thesis can provide a reference for the micro-vibration design of TFT-LCD workshop buildings.