Design, Analysis And Testing Of A Multi-scale Mirco/Nano-positioning System

With the rapid development of nanotechnology, positioning accuracy is changing from mm-level andμm-leve to nm-level. The high precise fields, such as micro-robotics, MEMS systems, Optics and Precision Engineering, aerospace, bio-medical devices, need mirco/nano-scale positioning system with multi-scale, multi-degree-of-freedom, nm-level precision, ms-level positioning speed. But the positioning precision of the traditional mechanical positioning system can not realize nm-level because of mechanical clearance and friction. However, the positioning system driven by Piezo-actuator can realize the design requirements, and has the advantage of compact structure, easy to control and manufacture. It has become a hotspot at home and abroad, especially in the USA, Japan and Germany. But its work travel is less than mm-level. Therefore, studying multi-scale micro/nano positioning system is helpful to improve our micro/nano-fabrication, manufacturing, measurement technology, with a very important research significance.This paper focuses on multi-scale, multi-DOF and micro/nano-positioning, designs a 5-DOF positioning system innovatively, and has applyed a national invention patent (201010101175.3). Structural design, static and dynamic analysis, control, testing and comprehensive evaluation were researched. The main research work is as follows: In terms of flexible mechanism, mechanical principles, innovative design method, the program, composition and principle were researched. A novel 5-DOF micro/nano-positioning system was designed, and the prototype was developed. Using mechanics and pseudo-rigid-body-method, its analytical expression of the static and dynamic performances were derived. The total performance optimization model were established, and the structure of the 5-DOF micro/nano-positioning system was optimized.Based on institutional analysis and spatial analytical method, the kinematic model of the 5-DOF positioning system was established, and the forward and inverse solutions were derived. The deformation of coordination and control law of the positioning system were revealed. The dynamic model was obtained in terms of pseudo-rigid- body and structure matrix method. The static and dynamic performances were simulated by ANSYS and Matlab, and the deformation, stress, stiffness, dynamic response were obtained. Using engineering control principle and Matlab/Simulink, the dynamic responses of the 5-DOF micro/nano-positioning system controlled by open loop style, PID, and BP neural network PID were obtained. Through the comparative analysis of dynamic characteristics of the three control method, the optimal control method wers realized. Then the processing technology of three-dimensional integral positioning platform was discussed. Meanwhile, the processing method of the 5-DOF micro/nano-positioning platform was devoloped, and the prototype was manufactured.In terms of the principle of the micro/nano-positioning method, the experiment setup of the 5-DOF positioning system was built, and its space travel was tested. The positioning accuracy, linearity, dynamic response and carrying capacity have been performed. Multi-scale micro/nano-position was realized and the expectant design goal was achieved. The comprehensive performance of the 5-DOF micro/nano-positioning system was evaluted, and various static and dynamic performances of the positioning system were obtianed.