Research Of Emergency Power Supply And Distribution System Application In Semiconductor Factory

As the semiconductor industries sustained developing, china has gradually become the largest semiconductor market. The semiconductor industry is booming and maintains the momentum of sustained growth; so many companies have set up the semiconductor factories in china like as Intel, TSMC and SMIC etc. The manufacturing process in semiconductor factory needs many kinds of chemicals and other flammable and toxic, corrosive gases. The semiconductor factory which production characteristics determine the event of a long period of power interruption will cause huge financial losses, so the semiconductor chips factory's safety and economy are in the semiconductor plant must have a reliable and stable supply of electricity. In the existing science,technology and the environment, with the uninterrupted power supply the diesel generator has become the largest semiconductor factories from the necessary choice. Thus the establishment of an emergency power supply and distribution system in the form of semiconductor plant is significant.Here based on a domestic manufacturer semiconductor chips expanding capacity background, first based on the factory phase I power architecture we analysis the phase II power system emergency generators system architecture and clearly defined the project goal; second we calculated the emergency generators quantity through list and analysis the factory emergency loads, we also make the feasibility calculation of generator building ventilation volume; finally we make the emergency power supply and distribution system architecture of this project.This paper combined with factory actual, research and realized the emergency power supply and distribution automation system. With the factory production actual requirements, designed, implemented and elaborated on the emergency power supply system of the four main kinds of logical functions: the electricity failure without warning mode,parallel connection with a pair of electricity supply mode,the electricity failure with predict warning/generator fix output power mode,testing mode; The electricity has a warning that the work of the generator set pattern, a test model output; designed, implemented and elaborated on the emergency power supply system man-machine interface graphics and operation procedure corresponds to four main kinds of the logic functions; designed and implemented the emergency power distribution system function logics and man-machine interface for power and control systems.