Research Of Nir Miniature Spectrometer System Based On DMD

Under the rapid development of the spectrometer technology, NIR Miniature spectrometer, which is compact, low-cost, fast, online detecting, becomes the research hot spot of the modern detective device. At present, the key points of the miniature spectrometer are controlling the core device, enhancing SNR, decreasing the price. To solve the problems, this paper focus on the research of NIR Miniature spectrometer based on digital micro mirror device(DMD), which has significant value on science and practical application.According to the analysis of the miniature spectrometer both International and domestic, a NIR Miniature spectrometer based on DMD is proposed with a single detector. Both light system and dispersed system of the NIR Miniature spectrometer is designed and optimized. The research on the fabrication and calibration is carried out. Finally, the prototype is developed successfully. The paper mainly covers work as following.â‘ After the study of NIR Miniature spectrometer both home and aboard, propose the scheme of the NIR Miniature spectrometer system.â‘¡On the based of the principle and specialties of the micro mirror arrays, propose the structure of the NIR Miniature spectrometer. Choose optical component. Use ZEMAX optical software to design and optimize the light system and the dispersed system. The aberration is reduced.â‘¢In order to improve the resolution of this spectrometer, this paper gives the analysis of the new effects which is caused by micro structure, and optimal values of the key factors.â‘£Finish the fabrication and calibration of the prototype. Its range of wavelength is 1000-1780nm, the resolution is less than 20nm, and the absolute error is 3nm.