A Study Of MEMS-DMs With Finite Element Method

Adaptive optics is a complicated subject which have science and project character. It study real time the theory, system, technology and project of changing the wavefront. By using the MEMS technology, the machine of micro adaptive optics system has less volume and less weight. And it make it possible for the micro adaptive optics system to go up by the artificial satellite. With the micro adaptive optics the artificial satellite can shot clearer photos. The finite element method developed rapidly recent years. and it can be used in many subjects. The deformable mirror in the micro adaptive system is often analysed by the finite element method. MEMS is often do analysis by finite element methods too. and it usually involved many subjects and knowledge in it's analysis. such as mechanics electronics calorifics. Then we should use coupling analysis in finite element method. It is very important to do the meshing in the finite element analysis. The mesh can disperse the continuum. It decide the precision and computation of the follow steps. In this dissertation the object to be analyzed has regular shapes and it is easy to do the meshing. I compute the displacement of a electrostatic deformable mirror by the finite element method using two different software. One is Matlab and the other is Ansys. I should know the full process of the computation and edit the code all by myself by using Matlab. But when using Ansys I only input the argument. The result of the two software can be compared.