Micro Electrostatic Vibration Generator Simulation Technology

Electrostatic vibration energy harvesting generators is a hot topic of the energy harvesting technology recent years. In order to optimize the generator system and to increase energy harvesting, it is necessary to develop models of the generator system. This paper discusses the theoretical model of three kinds of electrostatic generator.On this basis, paper discusses the plate traverse vibration generator and plate longitudinal vibration generator respectively and establishes their equivalent circuit according to the theoretical model. It also gives a comparable study-and confirmation to the equivalent circuit using PSPICE and MODELICA.The model of the plate traverse vibration generator is studied and simulated by MODELICA software at first. As a comparison, the paper also builds the equivalent circuit of the plate traverse vibration generator model with Polynomial controlled-sources of SPICE, combined with the empirical expression of the variable capacitor derived from Finite element method (FEM) by S Boisseau, simulates the equivalent circuit and comparable analysis their results.Then the paper derives the characteristic equations of longitudinal vibration generator with the energy method and builds the equivalent circuit. When there is no-Vibration in environment, the paper gives the theory testing. When there is periodic vibration in environment, the paper gives a comparable study to the equivalent circuit from two methods.The simulation results indicate that the equivalent circuit can simulate the electrical properties of the original circuit effectively. At last the paper summarizes on full-text articles and points out the shortcomings of the work and the next research direction.